JPH0743936Y2 - イオン注入装置 - Google Patents

イオン注入装置

Info

Publication number
JPH0743936Y2
JPH0743936Y2 JP1988118126U JP11812688U JPH0743936Y2 JP H0743936 Y2 JPH0743936 Y2 JP H0743936Y2 JP 1988118126 U JP1988118126 U JP 1988118126U JP 11812688 U JP11812688 U JP 11812688U JP H0743936 Y2 JPH0743936 Y2 JP H0743936Y2
Authority
JP
Japan
Prior art keywords
current
positive
threshold value
side comparator
negative
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1988118126U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0239453U (en]
Inventor
裕教 熊崎
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nissin Electric Co Ltd
Original Assignee
Nissin Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nissin Electric Co Ltd filed Critical Nissin Electric Co Ltd
Priority to JP1988118126U priority Critical patent/JPH0743936Y2/ja
Publication of JPH0239453U publication Critical patent/JPH0239453U/ja
Application granted granted Critical
Publication of JPH0743936Y2 publication Critical patent/JPH0743936Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP1988118126U 1988-09-07 1988-09-07 イオン注入装置 Expired - Lifetime JPH0743936Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1988118126U JPH0743936Y2 (ja) 1988-09-07 1988-09-07 イオン注入装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1988118126U JPH0743936Y2 (ja) 1988-09-07 1988-09-07 イオン注入装置

Publications (2)

Publication Number Publication Date
JPH0239453U JPH0239453U (en]) 1990-03-16
JPH0743936Y2 true JPH0743936Y2 (ja) 1995-10-09

Family

ID=31362208

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1988118126U Expired - Lifetime JPH0743936Y2 (ja) 1988-09-07 1988-09-07 イオン注入装置

Country Status (1)

Country Link
JP (1) JPH0743936Y2 (en])

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002522899A (ja) * 1998-08-03 2002-07-23 バリアン・セミコンダクター・エクイップメント・アソシエイツ・インコーポレイテッド プラズマ浸漬イオン注入ドーピング装置用のドーズ量モニター

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62154596U (en]) * 1986-03-25 1987-10-01
JPS6399288U (en]) * 1986-12-18 1988-06-27

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002522899A (ja) * 1998-08-03 2002-07-23 バリアン・セミコンダクター・エクイップメント・アソシエイツ・インコーポレイテッド プラズマ浸漬イオン注入ドーピング装置用のドーズ量モニター

Also Published As

Publication number Publication date
JPH0239453U (en]) 1990-03-16

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